This week is the International Electron Devices Meeting (IEDM), December 8-11, in San Francisco, California. We have presented some of the research already in previous weeks. Here are some details of work at STMicroelectronics, IBM and of collaboration at
Toshiba and Sony.
SUSS MicroTec says it offers a cost-effective alternative to high-resolution electron beam lithography for printing sub-100nm geometries with three embossing tools based on its mask aligner and bonding tools.
Donaldson High Purity Products, a division of the Donaldson Company, Inc. focused on the design and manufacture of gas-phase contaminant filtration solutions for the semiconductor industry, today announced immediate availability of a new point-of-use filter. Designed in cooperation with major optical lithography tool manufacturers and employing multiple filtration mechanisms, the LITHOGUARD POU effectively controls gas-phase contamination that effects image quality and causes degradation of optical elements, thereby improving yield rates and increasing uptime of lithography exposure tools. With the capability for removing bases, acids and organic gas phase contaminants at high efficiencies, the LITHOGUARD POU is ideal for the chemical filtration of pressurized air streams in critical point-of-use applications.
For more information: http://www.donaldson.com/en/semiconductor/index.html
Or e-mail :
Donaldson is a supplier of chemical filtration solutions for
the Semiconductor industry with products targeted at high efficiency removal
of airborne molecular contaminants of concern to processes and tools. The
product range includes Point-of-Use filters with applications for process
air, CDA and nitrogen, chemical filtration systems for tools (Lithography,
Vertical Furnaces, Mask making... ) and a new range of laminar flow, low
pressure drop media for minienvironments (wafer stockers, reticle stockers,
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levels of bases, organics and acid gases and careful selection of
Based in Leuven, Belgium, Donaldson Europe serves the
European Semiconductor market.
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Singapore foundry Chartered Semiconductor Manufacturing reports improved expectations in Q4. Revenues, shipments and fab utilisation levels are all set to be higher than previous guidance (October 25, 2002) suggested.
Researchers from France and the Netherlands have found that multiwalled carbon nanotubes can have a "reduced brightness" ten times larger than state-of-the-art electron sources for microscope systems (Nature, November 28, 2002).
Germanys Institut fuer Mikrotechnik Mainz (IMM) has applied for a patent on miniaturised analysis system for the detection of TNT (2,4,6-trinitrotoluene) in environmental samples. The system provides for a fast on-site analysis of TNT, its decomposition products (metabolites) and pesticides in water and soil.
Swedish mask writing tool producer Micronic has withdrawn its forecast for 2002 and is to reduce costs. The company says that a weak semiconductor market continues to affect its customers. Micronic has been notified of a further push out in the shipment of the companys second Sigma system, planned for delivery in Q4, 2002.
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SEMI reports a preliminary book-to-bill ratio for the North American
semiconductor equipment industry of 0.73 in October, based on $766mn in orders and billings of $1.05bn. These figures represent growths of 19% and 18% on 2001, respectively. The book-to-bill was 0.80 in September and 1.02 in August.
Christ Water Technology Group (CWT) is to deliver a high-performance
ultrapure water system to mainland China. This unit will produce
270m3/hour of ultrapure water for semiconductor production. The value of the order is a two-digit million-dollar figure
Spectrian has agreed to pay Cree Microwave $5mn in exchange for the
termination of a December 2000 purchase and supply agreement that was scheduled to expire in June 2003.
Akrion has received a repeat order for a $2mn GAMA advanced
front-end-of-line (AFeOL) cleaning tool to be installed at a European facility. The customer will use the new GAMA in the production of micro-electro-mechanical systems (MEMS). The wet station uses a patented DIO3 (high concentration ozonated DI
water) organic cleaning tank.
Motorola is to use Optonics EmiScope-I diagnostic solution for node level timing measurement of flip-chip and silicon-on-insulator (SOI) devices. EmiScope-I is currently in production in two Motorola diagnostic facilities. EmiScope provides a multi-GHz bandwidth and highly accurate, extendible diagnostic platform to measure switching (timing) events through photon emission measurement.