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Sputtering For 300mm Magnetic Memory Production

German company Singulus Technologies has launched a thin-film sputtering system aimed at production of magnetic RAM on 300mm wafers.
German company Singulus Technologies has launched a thin-film sputtering system aimed at production of magnetic RAM on 300mm wafers.


The TIMARIS 200/300mm bridge tool is dedicated to tunnel magnetic resistance (TMR) technology - either for semiconductor application MRAM or for hard disk thin film heads.


TMR elements consist of a stack of extremely thin layers (as thin as 1nm and less with sub-0.1nm control) of ferromagnetic and nonmagnetic metallic films and an insulating barrier.


Throughput for a generic TMR layer stack is about 25 wafer/hour.

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