News Article
Sputtering For 300mm Magnetic Memory Production
German company Singulus Technologies has launched a thin-film sputtering system aimed at production of magnetic RAM on 300mm wafers.
German company Singulus Technologies has launched a thin-film sputtering system aimed at production of magnetic RAM on 300mm wafers.
The TIMARIS 200/300mm bridge tool is dedicated to tunnel magnetic resistance (TMR) technology - either for semiconductor application MRAM or for hard disk thin film heads.
TMR elements consist of a stack of extremely thin layers (as thin as 1nm and less with sub-0.1nm control) of ferromagnetic and nonmagnetic metallic films and an insulating barrier.
Throughput for a generic TMR layer stack is about 25 wafer/hour.