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MEMS Equipment & Materials Report From Yole

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The strong growth of the MEMS sector will drive the market for specific MEMS equipment and materials.
Yole Développement releases its new report dedicated to trends & opportunities in MEMS equipment and materials. World MEMS equipment & materials market 2008 report provides you an analysis of the different MEMS devices: IJ heads, pressure sensors... For every MEMS device, Yole gives market outlook, key players, new applications and manufacturing trends.

The MEMS sector will see strong growth for the coming years because of many new products enabled by MEMS devices. Consumer applications (such as Wii, iPhone, PicoP picoprojector …) will be major contributors to the 17% average growth for the next five years. The automotive market will have modest growth of a few % while wireless telecommunications and bio medical will experience double digit growth. This healthy business will drive the need for production tools (etching, litho …) and materials (wafers, chemistry …) as more and more MEMS makers will ramp up production.

“Among the most dramatic MEMS developments, the US regulation for tire pressure sensors will boost the production to 7 million in unit shipments. In 2008, production for Si microphones will begin in earnest”, explains Dr Eric Mounier, Project Manager at Yole Développement.

By 2012, MEMS makers will be shipping almost 8 billion MEMS units a year worth $15.5 billion. Si microphones, micro displays, RF MEMS and microfluidic chips will account for a large part.

The MEMS production tool market will reach $680M by 2012 with most of the market value being for front end equipment. MEMS equipment sales will undergo a 17% average annual growth until 2012. This analysis includes each MEMS process: etching, wafer bonding, inspection & measurement, lithography and more.

Although MEMS processing uses standard IC processes, there are very specific steps which are covered by Yole's team. For example, they are:
-Deep reactive ion etching: mostly used for inertial MEMS, but now also for IJ heads and micro actuators. Deep etching tools are one of the most promising opportunities for MEMS production.
-Sacrificial layer etching: usually, wet etching is used, but dry etch technologies are gaining momentum (XeF2, vapour HF).

Materials for MEMS will be a $603M market in 2012 according to Yole. Regarding wafer processing, 4.5M 6” eq wafers will be processed in 2008 and more than 6M by 2012. Dr Eric Mounier explains that MEMS production will mostly shift to 6” wafers with increasing use of 8”, despite smaller and smaller MEMS dies. SOI wafer demand will experience high growth (14% over 2007-2012), mostly for accelerometers, MOEMS, gyros and pressure sensors.
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