News Article
Harvard Univeristy Chemists Believe They Have Developed A Previously Unknown
Harvard Univeristy chemists believe they have developed a previously unknown
catalytic mechanism that can grow nanolaminates at the rate of 32 monolayers
per cycle (Science, October 11, 2002).
The authors see this as a
The technique uses alternate vapours of trimethylaluminium and
tris(tert-butoxy)silanol to deposit highly conformal layers of amorphous
silicon dioxide and aluminium oxide in 12nm thick nanolaminates.
The chemists believe that their catalytic mechanism also operates during the
rapid ALD of many other metal silicates.
tris(tert-butoxy)silanol to deposit highly conformal layers of amorphous
silicon dioxide and aluminium oxide in 12nm thick nanolaminates.
The chemists believe that their catalytic mechanism also operates during the
rapid ALD of many other metal silicates.
