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IMEC Enters 300mm Domain

IMEC is setting up a 300mm silicon research platform initiative. The aim is to perform advanced process research at least two generations ahead of manufacturing. IMEC's local Flemish government will provide funding of EUR37.18mn for the cleanroom construction.
The goal of the research platform is to demonstrate novel device

architectures and to perform research on process steps and modules. It will

be built around the world's most advanced lithography clusters such as 157nm

and extreme ultraviolet (EUV).

The new fab will be located next to current IMEC facilities. Strategic

long-term partnerships with a core set of equipment suppliers and major IC

manufacturers will be set up to carry the investments.

This new lab will also allow the freeing up of space in the current 200mm

cleanroom for research into a range of nanotechnology domains.
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