In-Stat/MDR reports that some 60 micro-electro-mechanical system (MEMS) fabs/foundries are operating with several hundred start-ups also coming into the industry (many of which have their own in-house prototyping and/or fabrication facilities). Countless universities and government labs worldwide research MEMS technology.

"Equipment for MEMS fabrication is now more available than ever before,
ranging from dual purpose (for both semiconductor and MEMS processing steps)
to purely MEMS-specific," says Marlene Bourne, an In-Stat/MDR senior
analyst. "In some areas, standard semiconductor equipment is perfectly
suitable; whereas in others, MEMS fabrication presents some unique issues
that can be quite different from semiconductor manufacturing -- and these
differences are growing more apparent."
Bourne points to metrology as an example. Here, MEMS provides a greater
challenge for inspection, testing and analysis than semiconductor ICs. As a
result, there is sizeable opportunity at hand for companies in this sector.
One of the biggest competitive factors in the MEMS fab equipment market is
used equipment. While many start-ups may have funds to install in-house
facilities, they often purchase used, rather than new, equipment. As a
result, equipment suppliers are finding themselves buying their own old
equipment to re-sell it to this particular market segment.
More semiconductor equipment manufacturers are involved in MEMS-specific
equipment than would be expected. Several of the top suppliers now have
divisions focused solely on MEMS solutions, and no doubt more will emerge in
time. There are even several start-ups who have developed and are offering
equipment specifically for the MEMS market. Toolsets range from those for
deposition, lithography, and etching, to wafer bonders, dryers and other
equipment.