News Article
Lambda Physik Is To Invest Up To EUR5mn Until 2004.
Lambda Physik is to invest up to EUR5mn until 2004 in the development of
157nm laser technology for microlithography. Up to 38% of the development
and research expenses for the European 157nm microlithography consortion
will come from the German Federal Ministry of Education and Research (BMBF).
The consortium consists of industry partners such as ASML, Carl Zeiss,
Jenoptik, Schott and Infineon as well as European universities and research
institutions. This initiative is part of the European Medea+ project (FLUOR)
on the development of optical lithography.
The 157nm technology is expected to be used for the production of microchips
from 2005-06 on target structures in the 50-70nm range. Lamda Physik shipped
the first prototypes for the development of 157nm technology in 1999.
'In addition to the semiconductor industry, we see interesting applications
for 157nm laser technology also in the micromachining and lifesciences
area,' says Lambda CEO Dr Dirk Basting.
Jenoptik, Schott and Infineon as well as European universities and research
institutions. This initiative is part of the European Medea+ project (FLUOR)
on the development of optical lithography.
The 157nm technology is expected to be used for the production of microchips
from 2005-06 on target structures in the 50-70nm range. Lamda Physik shipped
the first prototypes for the development of 157nm technology in 1999.
'In addition to the semiconductor industry, we see interesting applications
for 157nm laser technology also in the micromachining and lifesciences
area,' says Lambda CEO Dr Dirk Basting.
