News Article
Wafer Cleaning Tool Company SEZ Group Has Received An Order Worth CHF4.8m
Wafer cleaning tool company SEZ Group has received an order worth CHF4.8m
for multiple spin-processors from a European 300mm consortium. The 304s will
be used for backside film removal and decontamination including bevel clean.
The tool orders are the first for SEZ from this fab. Delivery is scheduled
for the current business year.
Semitool has received a multi-$m order from Texas Instruments for multiple
300mm wafer level packaging systems. The systems include the Paragon
electroplating tool and the Spectrum 300 batch chemical etch and strip
processing system.
WaferMasters announced the first order for its Stacked Annealing Oven (SAO)
thermal processing system from a major European semiconductor manufacturer,
following successful beta and production testing at a 300mm fab in Japan.
The SAO tool processes up to five wafers simultaneously at temperatures up
to 500C. The energy consumption is less than 5kW or 25% of the requirement
for similar systems, claims WaferMasters. Applications include anneal for
copper, hydrogen, spin-on glass (SOG), low-k dielectrics and compound
semiconductors along with aluminum sintering and polyimide bake.
Aehr Test Systems has completed development and successful qualification of
its FOX full-wafer burn-in system for VCSELs (vertical cavity surface
emitting lasers) in partnership with Avalon Photonics. The qualification
testing included confirmation of successful burn-in of Avalon's VCSEL wafers
in Aehr Test's WaferPak full-wafer burn-in cartridge, and acceptance of the
cartridge by Avalon. These events complete the first phase of a development
partnership between Aehr Test and Avalon.
300mm wafer level packaging systems. The systems include the Paragon
electroplating tool and the Spectrum 300 batch chemical etch and strip
processing system.
WaferMasters announced the first order for its Stacked Annealing Oven (SAO)
thermal processing system from a major European semiconductor manufacturer,
following successful beta and production testing at a 300mm fab in Japan.
The SAO tool processes up to five wafers simultaneously at temperatures up
to 500C. The energy consumption is less than 5kW or 25% of the requirement
for similar systems, claims WaferMasters. Applications include anneal for
copper, hydrogen, spin-on glass (SOG), low-k dielectrics and compound
semiconductors along with aluminum sintering and polyimide bake.
Aehr Test Systems has completed development and successful qualification of
its FOX full-wafer burn-in system for VCSELs (vertical cavity surface
emitting lasers) in partnership with Avalon Photonics. The qualification
testing included confirmation of successful burn-in of Avalon's VCSEL wafers
in Aehr Test's WaferPak full-wafer burn-in cartridge, and acceptance of the
cartridge by Avalon. These events complete the first phase of a development
partnership between Aehr Test and Avalon.
