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Intellectual Property

  • Arch Microelectronic Materials has been granted two US patents in the field of chemical mechanical planarisation (CMP) slurries.
  • STMicroelectronics has filed a US lawsuit for patent infringement against Broadcom.
  • Thomson Derwent launched a micro/nano-electro-mechanical systems (MEMS & NEMS) Industry and Technology Patents profile (ITP) service.
  • Arch Microelectronic Materials has been granted two US patents in the field
    of chemical mechanical planarisation (CMP) slurries.

    One patent is for a single-component slurry that can replace traditional
    two-component slurries, which require an oxidiser to be mixed into a slurry
    before CMP. The new slurry incorporates these needed oxidisers, eliminating
    the mixing step. The second patent is for a two-component slurry that uses a
    standard dispersion as a first component and an activator solution as the
    second component. This allows different chemistries for different process
    steps and applications, while using the same standard dispersion.
    Arch Chemicals has granted exclusive rights for slurries using this
    technology to Planar Solutions - a US-based joint venture between Arch
    Microelectronic Materials and Germanys Wacker Chemical founded in 2000. The
    patented technology is the basis for Planars Cu10K-2 product. The joint
    venture grew out of a CMP product joint-development alliance that the two
    companies initiated in 1998.


    STMicroelectronics has filed a US lawsuit for patent infringement against
    Broadcom.
    ST alleges that Broadcom infringes six patents covering technology
    used in various semiconductor products, including products used in cable
    modem, set top box, and high speed networking applications (Nos.5,031,092;
    5,347,185; 5,515,225; 5,946,261; 6,025,746 and 6,087,709).


    Thomson Derwent launched a micro/nano-electro-mechanical systems (MEMS &
    NEMS) Industry and Technology Patents profile (ITP) service.

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