News Article
Tokyo Electron
Tokyo Electron (TEL) has announced the production and delivery schedule for its next generation 300mm coater/developer, Clean Track Lithius, to begin shipments in January 2004.
Tokyo Electron (TEL) has announced the production and delivery schedule for its next generation 300mm coater/developer, Clean Track Lithius, to begin shipments in January 2004. TEL is targeting stable production at the 70nm technology node. The system is capable of 150wafers/hour throughput.