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Advertisers News - DONALDSON INTRODUCES LITHOGUARD® POU

Donaldson High Purity Products, a division of the Donaldson Company, Inc. focused on the design and manufacture of gas-phase contaminant filtration solutions for the semiconductor industry, today announced immediate availability of a new point-of-use filter. Designed in cooperation with major optical lithography tool manufacturers and employing multiple filtration mechanisms, the LITHOGUARD POU effectively controls gas-phase contamination that effects image quality and causes degradation of optical elements, thereby improving yield rates and increasing uptime of lithography exposure tools. With the capability for removing bases, acids and organic gas phase contaminants at high efficiencies, the LITHOGUARD POU is ideal for the chemical filtration of pressurized air streams in critical point-of-use applications.

For more information: http://www.donaldson.com/en/semiconductor/index.html

Or e-mail : [email protected]

Donaldson High Purity Products, a division of the Donaldson Company, Inc. focused on the design and manufacture of gas-phase contaminant filtration solutions for the semiconductor industry, today announced immediate availability of a new point-of-use filter. Designed in cooperation with major optical lithography tool manufacturers and employing multiple filtration mechanisms, the LITHOGUARD POU effectively controls gas-phase contamination that effects image quality and causes degradation of optical elements, thereby improving yield rates and increasing uptime of lithography exposure tools. With the capability for removing bases, acids and organic gas phase contaminants at high efficiencies, the LITHOGUARD POU is ideal for the chemical filtration of pressurized air streams in critical point-of-use applications.


For more information: http://www.donaldson.com/en/semiconductor/index.html

Or e-mail :
[email protected]

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