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Process Development

The draft Sixth Framework Program (FP6) information society technologies (IST) research agenda for the European Union contains plans for pushing the limits of CMOS and preparing for post-CMOS and micro and nano system development. The draft is in the process of European Commission adoption and is not a binding document.
The draft Sixth Framework Program (FP6) information society technologies (IST) research agenda for the European Union contains plans for pushing the limits of CMOS and preparing for post-CMOS and micro and nano system development. The draft is in the process of European Commission adoption and is not a binding document.


The CMOS processing objective is to develop, ahead of the ITRS international roadmap, semiconductor devices shrunk by an order of magnitude down to 5nm. Alternatives are to be considered for the post-CMOS era. Lithography research is to include mask-less pattern transfer technologies, and mask making technologies.


It is expected that the work will crystallise around integrated projects such as “nano-CMOS”, the “high frequency challenge” or
“lithography”.


Work should, where appropriate, precede and complement work implemented under EUREKA/MEDEA and in initiatives at member and associated state level.


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