Sales & Orders
order for NuTool's integrated 300mm LuminaCu system.
The system is configured with patented electrochemical
mechanical deposition (ECMD) and reverse linear chemical
mechanical planarisation (RL-CMP) process modules for Cu
damascene development at the 65nm technology node and beyond.
The LuminaCu system delivers up to 60 wafers per hour for
typical Cu CMP applications. For Cu plating applications, the
LuminaCu ECMD system with its patented super planar deposition
technology delivers up to 90 wafers per hour. NuTool will ship the
system to the customer in Q1 2003.
Semiconductor test and packaging house ACE Semiconductor
(Shanghai) gave Austrian cleaning tool supplier SEZ its first order
for a wet cleaning system outside of Europe. The multi-$mn order is
for four batch processing immersion systems on 200mm wafers. The
systems will be used in advanced packaging applications. Delivery
of the four immersion tools is scheduled for Q1 2003.
Entegris has reached an agreement with its Japanese distributor of
wafer shipping and disk handling products, Marubeni, to transition
to a direct sales model for the region. The joint plan aims to
maintain customer service during the transition period, ending in
February 2003.
Sales and customer service activities for Entegris' wafer shipping
and disk handling products will move to the company's Japanese
subsidiary, Fluoroware Valqua Japan KK (FVJ).
Entegris will assume all responsibilities for sales, service,
support and logistics of its material integrity management products
in Japan. The company will also maintain its product inventory in
Japan, through a local infrastructure of support and customer
service programs.
The direct sales implementation is expected be complete on
February 28, 2003.
A DRAM manufacturer has placed a multi-system atomic layer
deposition (ALD) order with Genus. The order is for a combination of
StrataGem ALD and LYNX chemical vapour deposition (CVD)
systems in both 200mm and 300mm configurations.
The deal includes Genus' first ALD tool to go into semiconductor
volume production. Genus has previously gained acceptance for
production systems in the data storage industry.
Chinese chip manufacturer Huajing Microelectronics made a
multiple lithography product order with ASML. Huajing makes
discrete semiconductor components and bipolar integrated circuit
elements, processing 250,000 wafers per year.
