Sales & Orders
The European Business Team distribution company is to provide product distribution and service support to Sagitta, manufacturer of an electron microscope sample preparation system used for semiconductor yield enhancement, failure analysis, and process development.
South Korean supplier of silicon and epitaxial wafers LG Siltron has ordered the first BedeScan x-ray topography tool worth $265,000 from Bede plc.
Australian chemical supplier Silex Systems made an initial order for isotopically pure silicon-28 trichlorosilane from Isonics.
The company delivered GaN LED production tools to two Taiwan companies -
Epitech in June 2002 and to ITE Compound Semiconductor in October 2002. This
month (December) OIPT is to ship etch and deposition equipment to Taiwans
National Nano Device Laboratory (NNDL) for micro-electro-mechanical system
(MEMS) work.
Epitech is a venture set up by UMC. The OIPT tool (Plasmalab System 100 with
ICP180) is equipped to etch GaN and silicon dioxide and silicon nitride hard
masks. ITE now has a Plasmalab 80plus for plasma enhance CVD (PECVD) for
preparation of hard masks and device passivation.
NNDL is getting a Plasmalab System 100 with ICP380 chamber with deep
reactive ion etch capability for SiO2, Si3N4 and pure silicon. The system is
also capable of etching aluminium and titanium. A second chamber on the tool
is designed for PECVD of SiO2 and Si3N4.
The European Business Team distribution company is to provide product
distribution and service support to Sagitta, manufacturer of an electron
microscope sample preparation system used for semiconductor yield
enhancement, failure analysis, and process development. The representation
covers Europe including Scandinavia.
South Korean supplier of silicon and epitaxial wafers LG Siltron has ordered
the first BedeScan x-ray topography tool worth $265,000 from Bede plc.
BedeScan was launched four months ago. The tool uses a digital method to
detect and image crystalline defects in semiconductor wafers. A US patent
has been filed for the tools technology.
Australian chemical supplier Silex Systems made an initial order for
isotopically pure silicon-28 trichlorosilane from Isonics. Isotope purity
can improve silicons thermal conductivity by more than 60%, enabling chips
to operate faster or at lower temperatures. The initial order is worth
$200,000. Silex is developing laser isotope separation for a number of
materials, including silicon-28.
Silex has entered into collaboration with wafer manufacturer Sumitomo
Mitsubishi Silicon (SUMCO) to investigate the commercial potential of
silicon- 28. SUMCO will produce epitaxial wafers for several leading
semiconductor manufacturers that have already requested evaluation lots.
Silex believes it could have its own commercial production of silicon-28 as
soon as 2006. Isonics plans to continue to support SUMCO/Silex in its
requirements for silicon-28 in both development and commercial production
until Silex can bring its potentially lower cost technology on-line.
