News Article
Biochip Etch
Tegal has sold a 903e plasma etch system into the biochip industry. Zyomyx will use the tool to produce high-throughput, massively parallel protein analysis systems based on micro-electro-mechanical system technologies.
Tegal has sold a 903e plasma etch system into the biochip industry. Zyomyx will use the tool to produce high-throughput, massively parallel protein analysis systems based on micro-electro-mechanical system technologies.
Tegal expects to install the tool in early January 2003. This will be the first Tegal system at Zyomyx.
Zyomyx multiplexed, high-throughput Protein Profiling Biochips system aims at supporting the development of "proteomics" - the large-scale study of the vast, still undetermined number of proteins in the human body and their constantly changing form and function.
Meanwhile in Europe, Alcatel Micro Machining Systems has sold an AMS 200 SE silicon etcher to micro-electro-mechanical system (MEMS) producer Silex Microsystem, a Swedish company. Silex produces devices for the biotech and telecom industries.