News Article
Sales & Orders
SC Fluids has sold its first commercial 300mm supercritical CO2 (SCCO2)
system to a major IC fabricator. The fully automated,
cassette-to-cassette, single wafer ARROYO system will be installed in Q2
2003.
SC Fluids has sold its first commercial 300mm supercritical CO2 (SCCO2)
system to a major IC fabricator. The fully automated,
cassette-to-cassette, single wafer ARROYO system will be installed in Q2
2003. The sale is the product of a joint development programme targeted at
the development of commercial tools based on the techinique. SC Fluids
shipped and installed a 200mm, SCCO2 beta-tool at the customers research
facility in April 2002. Among the benefits of SCCO2 is the ability to
clean high aspect ratio features.
SC Fluids chief technology officer, Laura Rothman investigated SCCO2
technology at IBM in the early 1990s. She reports: "The original work at
IBM was motivated by the desire to find an environmentally friendly method
for precision cleaning of components."
system to a major IC fabricator. The fully automated,
cassette-to-cassette, single wafer ARROYO system will be installed in Q2
2003. The sale is the product of a joint development programme targeted at
the development of commercial tools based on the techinique. SC Fluids
shipped and installed a 200mm, SCCO2 beta-tool at the customers research
facility in April 2002. Among the benefits of SCCO2 is the ability to
clean high aspect ratio features.
SC Fluids chief technology officer, Laura Rothman investigated SCCO2
technology at IBM in the early 1990s. She reports: "The original work at
IBM was motivated by the desire to find an environmentally friendly method
for precision cleaning of components."
