News Article
SUSS Installs Line For Taiwan MEMS Producer
SUSS MicroTec is to install a lithography line at Taiwan’s National Nano Device Laboratories (NDL) for thin and thick resist MEMS (micro-electro mechanical systems) applications.
SUSS MicroTec is to install a lithography line at Taiwan's National Nano Device Laboratories (NDL) for thin and thick resist MEMS (micro-electro mechanical systems) applications.
The line consists of an MA150 production mask aligner and an ACS200 coating cluster. MEMS require thick resist layers in order to pattern three-dimensional structures.
From February 2003, the line will be open to customers and prospective customers for equipment demonstration and evaluation of process technology.