News Article
R&D
Researchers at Caltech and Case Western Reserve University have developed
nano-electro-mechanical systems (NEMS) with resonant frequencies greater
than 1GHz (Nature, January 30).
Researchers at Caltech and Case Western Reserve University have developed
nano-electro-mechanical systems (NEMS) with resonant frequencies greater
than 1GHz (Nature, January 30). The devices were based on two doubly clamped
beams measuring 1100x120x75nm. The structures were built in a silicon
carbide epitaxial layer on a silicon substrate. SiC was used because it is
significantly stiffer than silicon.
nano-electro-mechanical systems (NEMS) with resonant frequencies greater
than 1GHz (Nature, January 30). The devices were based on two doubly clamped
beams measuring 1100x120x75nm. The structures were built in a silicon
carbide epitaxial layer on a silicon substrate. SiC was used because it is
significantly stiffer than silicon.
