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amsung Electronics has ordered a FabGuard sensor integration and analysis system from INFICON Holding worth $2.6mn.
Samsung Electronics has ordered a FabGuard sensor integration and analysis
system from INFICON Holding worth $2.6mn. The order includes in situ
sensors, hardware and software. The deal marks the second contract for the
FabGuard system from Samsung. The equipment will be used in a 300mm mass
production fab. Installation is expected to start in February 2003.
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