Thin Film Metrology From Thermo Electron
Theta 300 is ideally suited to the metrology of gate dielectrics, including oxynitrides and newer materials such as hafnium oxide.
Theta 300 accommodates wafers up to 300mm and thicker specimens, such as packaged devices. It provides metrology, QC and R&D facilities with a powerful new tool to accelerate the development of tomorrow’s semiconductor devices.
Theta 300 can also be configured with an additional, side-mounted transfer chamber for FOUP, cassette, or clean-room applications.
Click here for the application form for a copy of the Theta 300 interactive presentation CD.
Theta 300 is ideally suited to the metrology of gate dielectrics, including oxynitrides and newer materials such as hafnium oxide.
Theta 300 accommodates wafers up to 300mm and thicker specimens, such as packaged devices. It provides metrology, QC and R&D facilities with a powerful new tool to accelerate the development of tomorrow's semiconductor devices.
Theta 300 can also be configured with an additional, side-mounted transfer chamber for FOUP, cassette, or clean-room applications.
Click here for the application form for a copy of the Theta 300 interactive presentation CD.