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Thin Film Metrology From Thermo Electron

Theta 300 provides the perfect solution for characterizing thin films on tomorrows semiconductor devices. Its unique, non-destructive, technology provides dose, distribution, layer thickness, purity, uniformity and composition measurements from any point on the wafer. Not only will it measure elemental compositions but it will also provide chemical state information. It detects the presence, nature and thickness of buried interface layers. Theta 300 measures contaminants in the layer, at the surface and at the interfaces.

Theta 300 is ideally suited to the metrology of gate dielectrics, including oxynitrides and newer materials such as hafnium oxide.

Theta 300 accommodates wafers up to 300mm and thicker specimens, such as packaged devices. It provides metrology, QC and R&D facilities with a powerful new tool to accelerate the development of tomorrow’s semiconductor devices.

Theta 300 can also be configured with an additional, side-mounted transfer chamber for FOUP, cassette, or clean-room applications.

Click here for the application form for a copy of the Theta 300 interactive presentation CD.

Theta 300 provides the perfect solution for characterizing thin films on tomorrows semiconductor devices. Its unique, non-destructive, technology provides dose, distribution, layer thickness, purity, uniformity and composition measurements from any point on the wafer. Not only will it measure elemental compositions but it will also provide chemical state information. It detects the presence, nature and thickness of buried interface layers. Theta 300 measures contaminants in the layer, at the surface and at the interfaces.


Theta 300 is ideally suited to the metrology of gate dielectrics, including oxynitrides and newer materials such as hafnium oxide.


Theta 300 accommodates wafers up to 300mm and thicker specimens, such as packaged devices. It provides metrology, QC and R&D facilities with a powerful new tool to accelerate the development of tomorrow's semiconductor devices.


Theta 300 can also be configured with an additional, side-mounted transfer chamber for FOUP, cassette, or clean-room applications.


Click here for the application form for a copy of the Theta 300 interactive presentation CD.

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