Researchers from Agere Systems claim that electrical breakdown in
thin-film dielectrics is based on an uncorrelated build-up of defects
(Nature, November 28, 2002). This contrasts with thick films where
the presence of defects makes it easier for new ones to form
resulting in a catastrophic failure. The scientists compared
measurements on 100 FETs with an uncorrelated model and found
The draft Sixth Framework Program (FP6) information society
technologies (IST) research agenda for the European Union
contains plans for pushing the limits of CMOS and preparing for
post-CMOS and micro and nano system development. The draft is in
the process of European Commission adoption and is not a binding
This week is the International Electron Devices Meeting (IEDM), December 8-11, in San Francisco, California. We have presented some of the research already in previous weeks. Here are some details of work at STMicroelectronics, IBM and of collaboration at
Toshiba and Sony.
SUSS MicroTec says it offers a cost-effective alternative to high-resolution electron beam lithography for printing sub-100nm geometries with three embossing tools based on its mask aligner and bonding tools.
Donaldson High Purity Products, a division of the Donaldson Company, Inc. focused on the design and manufacture of gas-phase contaminant filtration solutions for the semiconductor industry, today announced immediate availability of a new point-of-use filter. Designed in cooperation with major optical lithography tool manufacturers and employing multiple filtration mechanisms, the LITHOGUARD POU effectively controls gas-phase contamination that effects image quality and causes degradation of optical elements, thereby improving yield rates and increasing uptime of lithography exposure tools. With the capability for removing bases, acids and organic gas phase contaminants at high efficiencies, the LITHOGUARD POU is ideal for the chemical filtration of pressurized air streams in critical point-of-use applications.
For more information: http://www.donaldson.com/en/semiconductor/index.html
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Donaldson is a supplier of chemical filtration solutions for
the Semiconductor industry with products targeted at high efficiency removal
of airborne molecular contaminants of concern to processes and tools. The
product range includes Point-of-Use filters with applications for process
air, CDA and nitrogen, chemical filtration systems for tools (Lithography,
Vertical Furnaces, Mask making... ) and a new range of laminar flow, low
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European Semiconductor market.
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Singapore foundry Chartered Semiconductor Manufacturing reports improved expectations in Q4. Revenues, shipments and fab utilisation levels are all set to be higher than previous guidance (October 25, 2002) suggested.
Researchers from France and the Netherlands have found that multiwalled carbon nanotubes can have a "reduced brightness" ten times larger than state-of-the-art electron sources for microscope systems (Nature, November 28, 2002).
Germanys Institut fuer Mikrotechnik Mainz (IMM) has applied for a patent on miniaturised analysis system for the detection of TNT (2,4,6-trinitrotoluene) in environmental samples. The system provides for a fast on-site analysis of TNT, its decomposition products (metabolites) and pesticides in water and soil.
Swedish mask writing tool producer Micronic has withdrawn its forecast for 2002 and is to reduce costs. The company says that a weak semiconductor market continues to affect its customers. Micronic has been notified of a further push out in the shipment of the companys second Sigma system, planned for delivery in Q4, 2002.