WAFERMAP is an award winning software package used to collect, edit, analyze and visualize measured physical parameters on semiconductor wafers. WAFERMAP can import data files from various metrology tools such as ellipsometers, thickness gauges and four point probes. The imported data can then be visualized or printed as line scans, contour plots, 2D or 3D plots or as a histogram.
Several kinds of operations can be applied to the wafer maps such as rotation, shifting of the grid in the X or Y direction, or mirroring the data along the X or Y axis.
A Sigma Filter allows for the elimination of sites that exceed a user-defined range (e.g. measurement errors). It is also possible to compare different sets of data by adding, subtracting or dividing entire wafer maps. Typical applications include map generation for manually operated metrology tools and standardized visualization for different automatic metrology equipment (e.g. different types of four point probes in the same fab). WAFERMAP allows users to work off-line and to analyze and edit metrology data outside of the clean room. Its the perfect solution for paperless fabs.
Also, after your trial, if you purchase a license for this software and you are a Eurosemi Plus reader you will receive a discount!
Click on the banner below to get your free download or find out more about WaferMap.
Micron Technology is offering $550mn of convertible subordinated notes due
in 2010 to qualified institutional buyers. The notes will bear interest at a
rate of 2.50% per year, will be convertible into the companys common stock
at a conversion price of $11.79 per share and will be subordinated to all
present and future senior debt of Micron. The sale of the notes is expected
to close on February 4, 2003.
FSI International is in the process of evaluating various cost reductions,
including pursuing a strategic partner or partners for its microlithography
business. The company produces a 300mm resist processing system, the POLARIS
Agilent Technologies has agreed to buy the intellectual property and certain other assets of Pixel Devices International, a developer of complementary metal oxide semiconductor (CMOS) image sensor technology.
Epitaxial wafer foundry IQE is to cut a further 60 jobs from its staffing. The majority of the redundancies will be at IQE (Europe). The company reports that sales revenues for Q4 2002 are likely to be approximately 5% below the GBP5.6mn reported in the previous quarter.
SANYO Electric is to establish a new 10,000m2 JPY4.5bn factory for the production of heterojunction with intrinsic thin layer (HIT) photovoltaic cells and modules. The new factory is to be built in Osaka, Kaizuka City. Production is to start January 2004.
IMECs board of directors announced the construction of a new 300mm cleanroom based on a detailed engineering study made in 2002 and positive signals of industry and local government support. Construction of the new 2200m2 research fab will begin in February 2003, with completion due in 18 months.
Rockwood Specialties is to make a $7mn expansion and refurbishment investment at its Gréasque wafer reclaim facility in the South of France. The project focuses on increasing capacity and enhancing capabilities, particularly 200mm reclaimed silicon wafers.
Now you can monitor where it matters - at the critical surface. Whether its a wafer, a lens, an optical mirror or a metallic surface, AiM from Particle Measuring Systems gives you whats important: a highly sensitive, real-time measurement of contamination as it deposits on the surface.
1. WAFER SURFACES
As feature sizes continue to shrink, surface damage from molecular contamination becomes a larger and larger problem. AiM gives you real-time monitoring of incremental depositions of condensables as small as 0.02Ng/cm2.
2. OPTICAL COMPONENTS
Both aerospace and photolithography suffer from hazing of critical optics, sometimes even requiring replacement instead of cleaning. In fabs this problem will grow exponentially in the move to 193nm systems and beyond. AiM measures deposition of organic condensables that can form haze on mirrors and lenses.
3. METALLIC SURFACES
Sensitive disk drive heads can be ruined by exposure to trace concentrations of acidic vapors. Similarly, increased use of copper makes the semiconductor industry more and more vulnerable. Particle Measuring Systems now offers AiM sensors coated with copper or other metals to provide real-time monitoring of critical metallic surfaces.
4. FILTER BREAKTHROUGH
Industry is increasingly using chemical filtering to reduce the surface damage caused by molecular contamination. With selectable surfaces for detecting either condensables or acids, AiM can monitor and alarm as the deleterious molecules break through the filters.
For more information, call +44 1684 581000 or visit at www.surfacemc.com. For application notes regarding molecular contamination go to http://www.pmeasuring.com/particle/education/appNotes/molecular
The Singapore-based 300mm joint venture, UMCi, has begun equipment
move-in. The venture brings together UMC, Infineon Technologies and EDB
Investments, the investment arm of the Singapore governments Economic
EMCORE has acquired Agere Systems West Coast USA optoelectronics business
for $25mn. The transaction includes assets, products, technology and
intellectual property related to Ageres cable TV optical components,
telecom access and satellite communications operations.
SEMIs book-to-bill ratio for the North American semiconductor equipment
came in at 0.98 in December 2002. Three-month average bookings were 39% up
on December 2001 at $839mn and billings were 5% up at $853mn. The final
book-to-bill ratio for November 2002 is given as 0.80.