News Article
300 Mm Argon Annealed Wafers Qualified For Volume Production
Wacker Siltronic’s 300 mm argon annealed wafers have been qualified at one of its customers production sites. Wacker Siltronic achieved the qualification of annealed wafers for a 300 mm volume production line.
WACKER SILTRONIC now expects to gain even more experience on the performance of annealed wafers and to deepen their product knowledge on 300 mm annealed wafers.
Argon annealed wafers are used for leading-edge device applications with extremely challenging surface quality requirements. Such sophisticated wafers are produced by annealing of a tailored substrate, boast of a deep defect free zone compared to alternative annealing methods, and exhibit in addition an optimized depth dependent precipitation behaviour.